ICAMS / Interdisciplinary Centre for Advanced Materials Simulation
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Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: a molecular dynamics investigation

D. Edström, D. G. Sangiovanni, L. Hultman, I. Petrov, J. E. Greene, V. Chirita.

Journal of Applied Physics, 121, 025302, (2017)


DOI: 10.1063/1.4972963
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