@article{j.wu20211,
author = {J. Wu and Z. Wu and L. Liu and A. Hartmaier and M. Rommel and K. Nordlund and T. Wang and R. Janisch and J. Zhao},
title = {MD simulation study on defect evolution and doping efficiency of ptype doping of 3CSiC by Al ion implantation with subsequent annealing},
journal = {Journal of Materials Chemistry C},
volume = {7},
OPTnumber = {},
OPTmonth = {01},
year = {2021},
OPTpages = {22582275},
OPTnote = {},
OPTkey = {},
DOI = {10.1039/D0TC05374K}
}