@article{z.xu20201, author = {Z. Xu and F. Fang and L. Liu and Z. He and D. Tian and A. Hartmaier and J. Zhang and X. Luo and M. Rommel and K. Nordlund and G. Zhang}, title = {Nanocutting mechanism of 6HSiC investigated by scanning electron microscope online observation and stressassisted and ion implantassisted approaches}, journal = {The International Journal of Advanced Manufacturing Technology}, volume = {106}, OPTnumber = {}, OPTmonth = {01}, year = {2020}, OPTpages = {3869–3880}, OPTnote = {}, OPTkey = {diamond turning; silicon carbide; phase transformation; surface integrity; MD simulation; ion beam machining}, DOI = {10.1007/s00170019048866} }