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{"type":"article", "name":"d.edström20171", "author":"D. Edström and D. Sangiovanni and L. Hultman and I. Petrov and J. E. Greene and V. Chirita", "title":"Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: A molecular dynamics investigation", "journal":"Journal of Applied Physics", "volume":"121", "OPTnumber":"", "OPTmonth":"1", "year":"2017", "OPTpages":"025302", "OPTnote":"", "OPTkey":"", "DOI":"10.1063/1.4972963"}