ICAMS / Interdisciplinary Centre for Advanced Materials Simulation


Laser-printed hemispherical silicon Mie resonators

S. Syubaev, E. Mitsai, S. Starikov, A. Kuchmizhak.

Optics Letters, 46, 2304-2307, (2021)

Schematically illustrated formation process of Si NP upon single-pulse laser-induced dewetting of a-Si film.

Subwavelength nanostructures made of high-index low-loss materials have revolutionized the fields of linear and nonlinear nanophotonics, stimulating growing demands for efficient and inexpensive fabrication technologies. Here, we demonstrate high-precision and reproducible printing of hemispherical Si nanoparticles (NPs) via controllable dewetting of glass-supported ?-Si films driven by a single femtosecond laser pulse. The diameter of the formed nanocrystalline NPs can be fully controlled by initial ?-Si film thickness as well as lateral size of the laser spot and can be predicted by a simple empirical model based on conservation of energy and mass. A resonant optical response associated with Mie-type resonances supported by hemispherical NPs was confirmed by combining numerical modeling with optical microspectroscopy. Inexpensive and high-performing direct laser printing of nanocrystalline Si Mie resonators with a user-defined arrangement opens a pathway for various applications in optical sensing and nonlinear nanophotonics.

Cite as: https://doi.org/10.1364/OL.425809
DOI: 10.1364/OL.425809
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